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Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone.

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Présentation au sujet: "Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - France Téléphone."— Transcription de la présentation:

1 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) QUASI CONFOCAL EXTENDED FIELD SURFACE SENSING Joseph COHEN-SABBAN, Pierre-Jean CREPIN, Jérôme GAILLARD-GROLEAS STIL SA Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

2 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) CONFOCAL IMAGING The « SINGLE POINT » viewing system Confocal imaging consists in : 1) Imaging a point source S into a sharply focused point S’ 2) Reversely, imaging this sharply focused point S’ onto a tiny spatial filter S’’ Such an optical setup is absolutely blind for all the space except for the sharply focused point S’. S S’ S’’ L point source spatial filter - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

3 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) defocused specular objectdefocused backscattering object The Property of « Optical Sectioning » L S A’ S’’ A L S B’ S’’ B sharp focus position S’ CONFOCAL IMAGING - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

4 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) « Z-axis » FIELD EXTENSION IN CONFOCAL IMAGING The field extension can be obtained by stretching the chromatic aberration of the focusing lens L. The new optical system is then the assembling of an infinity of purely confocal systems, one for each wavelength. Such a compound system is absolutely blind for all the space except for the sharply focused color coded segment [S’(   S’( n  ]  Continuum of monochromatic images S’ ( i ) Polychromatic Point Source Spatial filter L S S’’ 1 n i The SINGLE LINE viewing system - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

5 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING The property of PERFECT FOCUS Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, The SINGLE LINE viewing system presents the unique property of « PERFECT FOCUS » over all the chromatic EXTENDED FIELD since at any given point of the axial field of view there is only one wavelength perfectly focused on the object, all the other wavelengths being absolutely inactive. L Extended field

6 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL SCANNING OPTICAL MICROSCOPY AVOIDS THE Z-AXIS STEPPING PROCESS USED TO GENERATE CONFOCAL SLICES THAT ARE COLLECTED TO CREATE A PERFECTLY FOCUSED IMAGE Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 EF - CSOM AVOIDS THE TIME CONSUMING COMPUTER RECONSTRUCTION OF THE OBJECT IMAGE CAN PROVIDE HIGHLY ACCURATE 3D SURFACE METROLOGY WHEN AN ADEQUATE SPECTRAL DECODING IS IMPLEMENTED

7 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING 3D SURFACE METROLOGY (1) - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, D SURFACE METROLOGY CAN BE ACHIEVED WHEN SUCCESSIVELY PERFORMING THE FOLLOWING STEPS. SPACE CODING By stretching the axial chromatic aberration of the illuminating beam SPACE DECODING By analysing the spectral content of the backscattered / backreflected beam

8 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING 3D SURFACE METROLOGY (2) The confocal spatial filter limits the wavelengths bandwidth  to a narrow band centered on the wavelength i coming in perfect focus onto the object surface. - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Continuum of monochromatic images S’ ( i ) Polychromatic Point Source Spatial Filter monochromatic image Object Surface Spectrometer S’’( i ) S’ L 1 n I I i  S The spectral decoding is performed by the spectrometer (position of the return quasi monochromatic beam on the CCD linear array).

9 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING 3D SURFACE METROLOGY (3) - Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 I i The system is volontarily rendered Quasi-Confocal by enlarging the Point Source and the Spatial Filter pinholes. Consequently, the filtered bandwidth  is enlarged in order to enable a highly resolved post processing and to get resolved points along the color coded segment [S’( 1), S’( n )].

10 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING CHR 150 BLOCK DIAGRAM Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Fiberoptic link Optical pen Polychromatic light source Spectrometer Digital Signal Processing Analogic and digital outputs OPTOELECTRONIC CABINET Fiberoptic coupler  n -

11 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, EXTENDED FIELD CONFOCAL IMAGING CHR 150 OPTICAL PENS * With an optical fiber of 10 microns core diameter ** On specular surfaces. For scattering surfaces the maximum angular slope can reach 80 degrees

12 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING CHR 150 SIGNAL OUTPUTS (1) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, MEASURING MODE : * Single Surface mode : - Intensity, Height : Both data are acquired simultaneously * Double Surface mode : - Intensity and height of the first surface - Intensity and height of the second surface - Thickness : calculated in real time acquired simultaneously

13 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) EXTENDED FIELD CONFOCAL IMAGING CHR 150 SIGNAL OUTPUTS (2) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, Analog Signals : - 2 configurable outputs V Digital Signals: - RS 232 serial link at bauds. - Birectionnal link used to :. transmit the measuring data to a PC. configure and drive the sensor from a PC Synchronization input and output : - 5V TTL signals.

14 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 EXTENDED FIELD CONFOCAL IMAGING CHR 150 Optical Sensor Optoelectronic Cabinet Optical pens

15 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Diamond machined Diffractive Germanium lens CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

16 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Diamond machined Diffractive Germanium lens CHR 150 Optical Sensor 20 µm depth of field optical pen 3D surface mapping - Height measurement Profile extracted along the black line Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

17 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Holographic Transmission diffraction grating (ZnSe) CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

18 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Groove top of a Holographic Transmission diffraction grating (ZnSe) CHR 150 Optical Sensor 20 µm depth of field optical pen Roughness component filtered with a 0.04 mm cut-off Waviness component filtered with a 0.04 mm cut-off Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Groove top area

19 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 CCD matrix area CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface metrology of a CCD matrix area Surface waviness of the same CCD matrix area

20 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 CCD matrix area CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface metrology of a CCD matrix area Surface waviness of the same CCD matrix area

21 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Sciences et Techniques Industrielles de la Lumière CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Photogravure processed in LIGA technology Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

22 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Waveguide CHR 150 Optical Sensor 80 µm depth of field optical pen Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, D surface mapping Height measurement Photorealistic rendering Intensity measurement

23 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Ball Grid Array (BGA) CHR 150 Optical Sensor 350 µm depth of field optical pen Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, D surface mapping Height measurement Profile extracted along the white line Zoom on one bumps line

24 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Field Emission Display flat screen CHR 150 Optical Sensor 20 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

25 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Micro Opto Electro Mechanical System (MOEMS) CHR 150 Optical Sensor 20 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement

26 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 CHR 150 Optical Sensor 20 µm depth of field optical pen Microlens array 3D surface mapping - Height measurement

27 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Molded microlens CHR 150 Optical Sensor 300 µm depth of field optical pen 3D surface mapping Height measurement Photographic representation

28 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Scratch on a Germanium lens CHR 150 Optical Sensor 300 µm depth of field optical pen 3D surface mapping Height measurement Extracted profile n°1 Extracted profile n°2 Extracted profile n°

29 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) CHR 150 Optical Sensor 80 µm depth of field optical pen 3D surface mapping Height measurement Gold deposition on Alumina substrate Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

30 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 CHR 150 Optical Sensor 80 µm depth of field optical pen Laser marking on a component packaging 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Profile extracted from the black line

31 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Paper CHR 150 Optical Sensor 20 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement

32 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Microwave Generator CHR 150 Optical Sensor 350 µm depth of field optical pen 3D surface mapping Height measurement Photorealistic rendering Intensity measurement Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001 Alumina Gold

33 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Roughness of S 1 Roughness of S 2 Thickness mapping : e = e ( x, y ) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, THICKNESS MAPPING DUAL SURFACE ROUGHNESS MAPPING Advantages * single side information pick-up * purely optical measurement * very fast * very accurate Dedicated software Polychromatic point source White light   Spectrometer   S1S1 S2S2

34 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Advantages * thickness measurement mode * single side information pick-up * purely optical measurement * very fast * very accurate Polychromatic point source Dedicated software White light   Spectrometer   Object surface : S 2 Thickness mapping e = e ( x, y ) S 2 = S ( x, y ) Reference Surface : S ABSOLUTE 3D SURFACE MAPPING Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001

35 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) OPTICS MANUFACTURING QUALITY CONTROL Advantages * no need to reverse the lens * purely optical measurement * very fast * very accurate Single Shot, FRONT and BACK SURFACES PICK-UP Dedicated software Polychromatic point source White light   Spectrometer Radiuses : R 1 R 2 Tilt, Centering diameter  Central thickness R1R1 R2R2 diameter    Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August,

36 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Advantages * purely optical measurement * no moving parts * very fast * very accurate z 2 ( 2 ) - z 1 ( 1 ) = R   Spherical object Radius R Spectrometer Polychromatic point source White light   C Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, SINGLE SHOT SPHEROMETRY

37 Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles Duchesne Aix en Provence Cedex 3 - France Téléphone : 33 (0) Télécopie : 33 (0) Optical Metrology for the Semicon, Optical and Data Storage Industries SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, CONCLUSION Implementation of controlled axial chromatic aberration to CONFOCAL SCANNING OPTICAL MICROSCOPY opens new ways to the application fields of : The proposed optical setup is capable of giving both information simultaneously. * Perfect Focus Free Shape Surface Microscopy * Free Shape 3D Surface Metrology


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